Αssessment of dielectric charging in micro-electro-mechanical system capacitive switches

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Αssessment of dielectric charging in micro-electro-mechanical system capacitive switches

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Abstract	The assessment of dielectric charging in MEMS capacitive switches is investigated. The information can be obtained only from simultaneous assessment of Metal-Insulator-Metal capacitance and MEMS capacitive switches the former allowing the determination of material properties and the latter of the device.
Author/Creator	M. Koutsoureli; L. Michalas; G. Papaioannou
Contractor	Εθνικό και Καποδιστριακό Πανεπιστήμιο Αθηνών (ΕΚΠΑ)
Publisher	University of Niš
Source	Facta universitatis - series: Electronics and Energetics 2013 Volume 26, Issue 3, Pages: 239-245
Language	English
Date	2013
Extent	7 pages
Identifier	DOI: 10.2298/FUEE1303239K ISSN: 22175997 ISSN: 03533670
Alternative Web page	http://www.doiserbia.nb.rs/Article.aspx?id=0353-36701303239K#.VyCrVXq1UY1
Subject	φυσικές επιστήμες ηλεκτρονική ηλεκτρολογικό υλικό ηλεκτρική ενέργεια
Keywords	MEMS,, Capacitive switches, Dielectric charging, Reliability
Is Related to	Charging and Discharging Processes in AlN Dielectric Films Deposited by Plasma Assisted Molecular Beam Epitaxy Charge Collection Mechanism in MEMS Capacitive Switches Μελέτη και Βελτιστοποίηση των Ηλεκτρικών Ιδιοτήτων Λεπτών Μονωτικών Υμενίων που Χρησιμοποιούνται σε Μικρο-Ηλεκτρο-Μηχανικά Συστήματα (MEMS) Temperature effects on the bulk discharge current of dielectric films of MEMS capacitive switches Determination of bulk discharge current in the dielectric film of MEMS capacitive switches Comparative study of AlN dielectric films’ electrical properties for MEMS capacitive switches Properties of contactless and contacted charging in MEMS capacitive switches
Type	Text (Journal article)
Scientific Coordinator	Παπαϊωάννου, Γεώργιος
Project Notes	Τίτλος Δράσης: Ηράκλειτος ΙΙ Τίτλος Πράξης: Μελέτη και βελτιστοποίηση των ηλεκτρικών ιδιοτήτων λεπτών μονοτικών υμενίων που χρησιμοποιούνται σε μικρο-ηλεκτρικά-μηχανικά συστήματα (Mems)