eng URI http://hdl.handle.net/10795/2979 φυσικές επιστήμες ηλεκτρονική ηλεκτρολογικό υλικό ηλεκτρική ενέργεια The assessment of dielectric charging in MEMS capacitive switches is investigated. The information can be obtained only from simultaneous assessment of Metal-Insulator-Metal capacitance and MEMS capacitive switches the former allowing the determination of material properties and the latter of the device. 7 pp. LOMv1.0 creator LOMv1.0 publisher LOMv1.0 Scientific Coordinator LOMv1.0 Project Executing Organisation 2013 Digital Library of the Operational Programme "Education and Lifelong Learning" abstract types Text MEMS, Capacitive switches Dielectric charging Reliability http://www.doiserbia.nb.rs/Article.aspx?id=0353-36701303239K#.VyCrVXq1UY1 395270 application/pdf http://repository.edulll.gr/edulll/bitstream/10795/2979/2/2979_1.84_%ce%94%ce%97%ce%9c_20_12_13.pdf URI http://hdl.handle.net/10795/2979 LOMv1.0creator 2016-04-27T12:12:26Z LOMv1.0validator 2016-04-27T12:12:26Z LOMv1.0 gre no no Copyright EYD-EPEDBM (Operational Programme "Education and Lifelong Learning")