eng URI http://hdl.handle.net/10795/2984 φυσικές επιστήμες ηλεκτρονική ηλεκτρολογικό υλικό ηλεκτρική ενέργεια The present work presents a new method to calculate the discharge current in the bulk of dielectric films of MEMS capacitive switches. This method takes into account the real MEMS switch with non uniform trapped charge and air gap distributions. Assessment of switches with silicon nitride dielectric film shows that the discharge current transient seems to obey the stretched exponential law. The decay characteristics depend on the polarization field’s polarity, a fact comes along with experimental results obtained from thermally stimulated depolarization currents (TSDC) method used in MIM capacitors. 4 pp. LOMv1.0 creator LOMv1.0 Scientific Coordinator LOMv1.0 Project Executing Organisation 2011 Digital Library of the Operational Programme "Education and Lifelong Learning" abstract types Text MEMS capacitive switches Dielectric films reliability Dielectric charging 383818 application/pdf http://repository.edulll.gr/edulll/bitstream/10795/2984/2/2984_1.84_%ce%94%ce%97%ce%9c_29_7_11.pdf URI http://hdl.handle.net/10795/2984 LOMv1.0creator 2016-05-04T08:06:09Z LOMv1.0validator 2016-05-04T08:06:09Z LOMv1.0 gre no no Copyright EYD-EPEDBM (Operational Programme "Education and Lifelong Learning")